Study on Growth Processes of Subnanometer Particles in...

Japanese Journal of Applied Physics 1994 / 7 Vol. 33; Iss. Part 1, No

Study on Growth Processes of Subnanometer Particles in Early Phase of Silane RF Discharge

Fukuzawa, Tsuyoshi, Kawasaki, Hiroharu, Shiratani, Masaharu, Watanabe, Yukio
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.4212
Date:
July, 1994
File:
PDF, 735 KB
1994
Conversion to is in progress
Conversion to is failed