Self-Aligned Local Channel Implantation Using Reverse Gate...

Self-Aligned Local Channel Implantation Using Reverse Gate Pattern for Deep Submicron Dynamic Random Access Memory Cell Transistors

Ha, Daewon, Sim, Jai-hoon, Kim, Kinam
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.1059
Date:
March, 1998
File:
PDF, 674 KB
1998
Conversion to is in progress
Conversion to is failed