Similarities in Spatial Distributions of Absolute GeH2...

Japanese Journal of Applied Physics 1998 / 4 Vol. 37; Iss. Part 2, No

Similarities in Spatial Distributions of Absolute GeH2 Density, Radical Production Rate and Particle Amount in GeH4 RF Discharges

Kawasaki, Hiroharu, Kida, Junichirou, Sakamoto, Kazutaka, Fukuzawa, Tsuyoshi, Shiratani, Masaharu, Watanabe, Yukio
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Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.L475
Date:
April, 1998
File:
PDF, 146 KB
english, 1998
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