Effects of Fluorocarbon Films on CF Radical in CF 4 /H 2 Plasma
Arai, Toshihiko, Goto, Miki, Horikoshi, Keita, Mashino, Souichi, Aikyo, SatoshiVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.4377
Date:
July, 1999
File:
PDF, 89 KB
english, 1999