Crystallographic Structures and Parasitic Resistances of...

Crystallographic Structures and Parasitic Resistances of Self-Aligned Silicide TiSi 2 /Self-Aligned Nitrided Barrier Layer/Selective Chemical Vapor Deposited Aluminum in Fully Self-Aligned Metallization Metal Oxide Semiconductor Field-Effect Transistor

Lee, Chang-Hun, Nishimura, Takamasa, Matsuhashi, Hideki, Yokoyama, Michio, Masu, Kazuya, Tsubouchi, Kazuo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.5835
Date:
October, 1999
File:
PDF, 441 KB
english, 1999
Conversion to is in progress
Conversion to is failed