Micropatterning of Chemical-Vapor-Deposited Diamond Films...

Japanese Journal of Applied Physics 2000 / 7 Vol. 39; Iss. Part 1, No

Micropatterning of Chemical-Vapor-Deposited Diamond Films in Electron Beam Lithography

Kiyohara, Shuji, Ayano, Kenjiro, Abe, Takahisa, Mori, Katsumi
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.4532
Date:
July, 2000
File:
PDF, 299 KB
english, 2000
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