Physical and Chemical Characterization of Reused Oxide...

Japanese Journal of Applied Physics 2001 / 3 Vol. 40; Iss. Part 1, No

Physical and Chemical Characterization of Reused Oxide Chemical Mechanical Planarization Slurry

Kim, Hyung-Joon, Eom, Dae-Hong, Park, Jin-Goo
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.1236
Date:
March, 2001
File:
PDF, 75 KB
english, 2001
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