Design and Fabrication of 1D and 2D Micro Scanners Actuated...

Japanese Journal of Applied Physics 2002 / 6 Vol. 41; Iss. Part 1, No

Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams

Tsaur, Jiunnjye, Zhang, Lulu, Maeda, Ryutaro, Matsumoto, Sohei, Khumpuang, Sommawan
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.4321
Date:
June, 2002
File:
PDF, 199 KB
english, 2002
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