Tungsten Based Electrodes for Stacked Capacitor...

Japanese Journal of Applied Physics 2002 / 11 Vol. 41; Iss. Part 1, No

Tungsten Based Electrodes for Stacked Capacitor Ferroelectric Memories

Trupina, L., Baborowski, J., Muralt, P., Meyer, V., Bouvet, D., Fazan, P., Lobet, M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.6862
Date:
November, 2002
File:
PDF, 164 KB
english, 2002
Conversion to is in progress
Conversion to is failed