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A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing
Sato, Norio, Ishii, Hiromu, Shigematsu, Satoshi, Morimura, Hiroki, Kamei, Toshikazu, Kudou, Kazuhisa, Yano, Masaki, Machida, Katsuyuki, Kyuragi, HakaruVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.2462
Date:
April, 2003
File:
PDF, 434 KB
english, 2003