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Micro Arc Monitoring by Detecting Charge Build-Up on Glass Surface of Viewing Port due to Plasma Dispersion in Plasma Processing Equipment
Yasaka, Mitsuo, Takeshita, Masayoshi, Miyagawa, RyujiVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.L157
Date:
February, 2003
File:
PDF, 163 KB
english, 2003