Reduction of Large Particles in Ceria Slurry by Aging and...

Reduction of Large Particles in Ceria Slurry by Aging and Selective Sedimentation and its Effect on Shallow Trench Isolation Chemical Mechanical Planarization

Kim, Dae-Hyeong, Kang, Hyun-Goo, Kim, Sang-Kyun, Paik, Ungyu, Park, Jea-Gun
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.6790
Date:
September, 2006
File:
PDF, 237 KB
english, 2006
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