Effect of Hydrogen on Secondary Grain Growth of...

Japanese Journal of Applied Physics 2006 / 9 Vol. 45; Iss. 9A

Effect of Hydrogen on Secondary Grain Growth of Polycrystalline Silicon Films by Excimer Laser Annealing in Low-Temperature Process

Heya, Akira, Matsuo, Naoto, Matsumura, Hideki, Kawamoto, Naoya
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.6908
Date:
September, 2006
File:
PDF, 184 KB
english, 2006
Conversion to is in progress
Conversion to is failed