Numerical Calculation of Implanted Nitrogen Diffusion in...

Japanese Journal of Applied Physics 2006 / 10 Vol. 45; Iss. 10B

Numerical Calculation of Implanted Nitrogen Diffusion in SUS304 during Plasma-Based Ion Implantation

Akamatsu, Hiroshi, Hattori, Hiroyuki
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.8168
Date:
October, 2006
File:
PDF, 136 KB
english, 2006
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