Low-Damage Indium Tin Oxide Formation on Organic Layers Using Unique Cylindrical Sputtering Module and Application in Transparent Organic Light-Emitting Diodes
Yamamoto, Hidetoshi, Oyamada, Takahito, Hale, William, Aoshima, Shoichi, Sasabe, Hiroyuki, Adachi, ChihayaVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.L213
Date:
February, 2006
File:
PDF, 221 KB
english, 2006