Room-Temperature Nanoimprinting Using Ladder Hydrogen...

Japanese Journal of Applied Physics 2007 / 8 Vol. 46; Iss. 8A

Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane

Nakamatsu, Ken-ichiro, Ishikawa, Kiyoshi, Taneichi, Noriaki, Matsui, Shinji
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.5388
Date:
August, 2007
File:
PDF, 165 KB
english, 2007
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