Monolithic Integration Fabrication Process of...

Japanese Journal of Applied Physics 2007 / 9 Vol. 46; Iss. 9A

Monolithic Integration Fabrication Process of Thermoelectric and Vibrational Devices for Microelectromechanical System Power Generator

Sato, Norio, Kuwabara, Kei, Ono, Kazuyoshi, Sakata, Tomomi, Morimura, Hiroki, Terada, Jun, Kudou, Kazuhisa, Kamei, Toshikazu, Yano, Masaki, Machida, Katsuyuki, Ishii, Hiromu
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.6062
Date:
September, 2007
File:
PDF, 354 KB
english, 2007
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