Development of Step-and-Scan-Type X...

Japanese Journal of Applied Physics 2007 / 9 Vol. 46; Iss. 9B

Development of Step-and-Scan-Type X Y -Stage System for Electron Beam Systems

Shinozaki, Hiroyuki, Komatsubara, Ryuichi, Nakamura, Tsuyoshi, Saji, Nobuhito, Miyashita, Masahiro, Amada, Akihisa, Tsunoda, Michio
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.6178
Date:
September, 2007
File:
PDF, 410 KB
english, 2007
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