Tip-to-Sample Distance Dependence of d...

Japanese Journal of Applied Physics 2008 / 2 Vol. 47; Iss. 2

Tip-to-Sample Distance Dependence of d C / d Z Imaging in Thin Dielectric Film Measurement

Naitou, Yuichi, Ando, Atsushi, Ogiso, Hisato, Kamohara, Siro, Yano, Fumiko, Nishida, Akio
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.1056
Date:
February, 2008
File:
PDF, 505 KB
english, 2008
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