Effect of VI/II Gas Ratio on the Epitaxial Growth of ZnO...

Japanese Journal of Applied Physics 2011 / 10 Vol. 50; Iss. 10

Effect of VI/II Gas Ratio on the Epitaxial Growth of ZnO Films by Metalorganic Chemical Vapor Deposition

Choi, Yong-Seok, Hwang, Dae-Kue, Kwon, Bong-Joon, Kang, Jang-Won, Cho, Yong-Hoon, Park, Seong-Ju
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.105502
Date:
October, 2011
File:
PDF, 619 KB
english, 2011
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