Basic Performance of a Logic Intellectual Property...

Japanese Journal of Applied Physics 2012 / 2 Vol. 51; Iss. 2

Basic Performance of a Logic Intellectual Property Compatible Embedded Dynamic Random Access Memory with Cylinder Capacitors in Low-$k$/Cu Back End on the Line Layers

Kume, Ippei, Inoue, Naoya, Hijioka, Ken'ichiro, Kawahara, Jun, Takeda, Kouichi, Furutake, Naoya, Shirai, Hiroki, Kazama, Kenya, Kuwabara, Shin'ichi, Watarai, Msasatoshi, Sakoh, Takashi, Takahashi, Tak
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.02BB01
Date:
February, 2012
File:
PDF, 1.17 MB
english, 2012
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