X-ray Photoemission Spectroscopy Study of GaAs(111)B...

Japanese Journal of Applied Physics 2012 / 3 Vol. 51

X-ray Photoemission Spectroscopy Study of GaAs(111)B Substrate Nitridation using an RF-Radical Source

Naritsuka, Shigeya, Mori, Midori, Takeuchi, Yoshitaka, Maruyama, Takahiro
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Volume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.51.048004
Date:
March, 2012
File:
PDF, 418 KB
english, 2012
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