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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - VUV light scattering measurements of substrtes and thin film coatings
Hultaker, Annette, Gliech, Stefan, Benkert, Nils, Duparre, Angela, Duparre, Angela, Singh, BhanwarVolume:
5188
Year:
2003
Language:
english
DOI:
10.1117/12.505585
File:
PDF, 410 KB
english, 2003