Production of Amorphous and Nanocrystalline Silicon Films by the Hot-Wire Activation Method
Andreev, M. N., Rebrov, A. K., Safonov, A. I., Timoshenko, N. I., Kubrak, K. V., Sulyaeva, V. S.Volume:
88
Language:
english
Journal:
Journal of Engineering Physics and Thermophysics
DOI:
10.1007/s10891-015-1277-4
Date:
July, 2015
File:
PDF, 291 KB
english, 2015