Direct insight into grains formation in Si layers grown on 3C-SiC by chemical vapor deposition
Khazaka, Rami, Portail, Marc, Vennéguès, Philippe, Alquier, Daniel, Michaud, Jean FrançoisVolume:
98
Language:
english
Journal:
Acta Materialia
DOI:
10.1016/j.actamat.2015.07.052
Date:
October, 2015
File:
PDF, 1.50 MB
english, 2015