Enhanced optical coherence vibration tomography for...

Sensors and Actuators A: Physical 2015 / 09 Vol. 233

Enhanced optical coherence vibration tomography for subnanoscale-displacement-resolution calibration of piezoelectric actuators

Zhong, Shuncong, Zhang, Qiukun
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Volume:
233
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2015.06.027
Date:
September, 2015
File:
PDF, 1.19 MB
english, 2015
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