Application of Cu-C and Cu-V alloys in barrier-less copper...

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Vacuum 2015 / 9

Application of Cu-C and Cu-V alloys in barrier-less copper metallization

Fei, Cao, Gao-hui, Wu, Long-tao, Jiang, Guo-qin, Chen
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Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2015.09.011
Date:
September, 2015
File:
PDF, 5.82 MB
english, 2015
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