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Acid-amplifying polymers: synthesis, characterization, and application to environmentally stable chemical amplification positive (ESCAP) resists
Arimitsu, Koji, Yonekura, Motoki, Furutani, MasahiroYear:
2015
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/C5RA15423E
File:
PDF, 1.51 MB
english, 2015