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[IEEE 2015 XVIII AISEM Annual Conference - Trento, Italy (2015.2.3-2015.2.5)] 2015 XVIII AISEM Annual Conference - Micromachined silicon radiation sensors - Part 2: Fabrication technologies
Bagolini, A., Boscardin, M., Conci, P., Crivellari, M., Giacomini, G., Mattedi, F., Piemonte, C., Ronchin, S., Zorzi, N., Benkechkache, M.A., Dalla Betta, G.-F., Mendicino, R., Pancheri, L., Povoli, MYear:
2015
Language:
english
DOI:
10.1109/AISEM.2015.7066822
File:
PDF, 811 KB
english, 2015