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[IEEE 2015 IEEE 65th Electronic Components and Technology Conference (ECTC) - San Diego, CA, USA (2015.5.26-2015.5.29)] 2015 IEEE 65th Electronic Components and Technology Conference (ECTC) - Advanced metallization scheme for 3×50µm via middle TSV and beyond
Van Huylenbroeck, Stefaan, Li, Yunlong, Heylen, Nancy, Croes, Kristof, Beyer, Gerald, Beyne, Eric, Brouri, Mohand, Gopinath, Sanjay, Nalla, Praveen, Thorum, Matthew, Meshram, Prashant, Anjos, DanielaYear:
2015
Language:
english
DOI:
10.1109/ECTC.2015.7159573
File:
PDF, 1.28 MB
english, 2015