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[IEEE 2015 IEEE 65th Electronic Components and Technology Conference (ECTC) - San Diego, CA, USA (2015.5.26-2015.5.29)] 2015 IEEE 65th Electronic Components and Technology Conference (ECTC) - Galvanic corrosion of silicon-based thin films: A case study of a MEMS microphone
Broas, M., Li, J., Liu, X., Ge, Y., Peltonen, A., Mattila, T.T., Paulasto-Krockel, M.Year:
2015
Language:
english
DOI:
10.1109/ECTC.2015.7159630
File:
PDF, 1.19 MB
english, 2015