[IEEE 2014 14th Non-Volatile Memory Technology Symposium (NVMTS) - Jeju Island, Korea (South) (2014.10.27-2014.10.29)] 2014 14th Annual Non-Volatile Memory Technology Symposium (NVMTS) - Grain size monitoring of 3D flash memory channel poly-Si using multiwavelength Raman spectroscopy
Yoo, Woo Sik, Ishigaki, Toshikazu, Ueda, Takeshi, Kang, Kitaek, Kwak, Noh Yeal, Sheen, Dong Sun, Kim, Sung Soon, Ko, Min Sung, Shin, Wan Sup, Lee, Byung Seok, Yeom, Seung Jin, Park, Sung KiYear:
2014
Language:
english
DOI:
10.1109/NVMTS.2014.7060843
File:
PDF, 411 KB
english, 2014