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A Novel and Effective Surface Flaw Inspection Instrument for Large-Aperture Optical Elements
Tao, Xian, Zhang, Zhengtao, Zhang, Feng, Xu, DeVolume:
64
Language:
english
Journal:
IEEE Transactions on Instrumentation and Measurement
DOI:
10.1109/TIM.2015.2415092
Date:
September, 2015
File:
PDF, 2.48 MB
english, 2015