Directed self-assembly graphoepitaxy template generation...

Journal of Micro/Nanolithography MEMS and MOEMS 2015 / 09 Vol. 14; Iss. 3

Directed self-assembly graphoepitaxy template generation with immersion lithography

Ma, Yuansheng, Lei, Junjiang, Andres Torres, J., Hong, Le, Word, James, Fenger, Germain, Tritchkov, Alexander, Lippincott, George, Gupta, Rachit, Lafferty, Neal, He, Yuan, Bekaert, Joost, Vanderberghe
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Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.3.031216
Date:
September, 2015
File:
PDF, 4.17 MB
english, 2015
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