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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] MOEMS and Miniaturized Systems XII - Closed-loop control driver for quasi-static MOEMS mirrors
Tortschanoff, A., Piyawattanametha, Wibool, Park, Yong-Hwa, Holzmann, D., Lenzhofer, M., Sandner, T., Kenda, A.Volume:
8616
Year:
2013
Language:
english
DOI:
10.1117/12.2004167
File:
PDF, 870 KB
english, 2013