SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MOEMS and Miniaturized Systems - Performance of a biaxial MEMS-based scanner for microdisplay applications
Wine, David W., Helsel, Mark P., Jenkins, Lorne, Urey, Hakan, Osborn, Thor D., Motamedi, M. Edward, Goering, RolfVolume:
4178
Year:
2000
Language:
english
DOI:
10.1117/12.396487
File:
PDF, 2.00 MB
english, 2000