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SPIE Proceedings [SPIE Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life - Novosibirsk, Russia (Monday 9 September 2002)] Seventh International Symposium on Laser Metrology Applied to Science,Industry, and Everyday Life - Use of a microprobe held by a laser beam for the study of surface reliefs
Jakl, Petr, Jezek, Jan, Sery, Mojmir, Jonas, Alexandr, Zemanek, Pavel, Chugui, Yuri V., Bagayev, Sergei N., Weckenmann, Albert, Osanna, P. HerbertVolume:
4900
Year:
2002
Language:
english
DOI:
10.1117/12.484462
File:
PDF, 296 KB
english, 2002