![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California (Sunday 1 August 2010)] Reflection, Scattering, and Diffraction from Surfaces II - Development of a tunable polarimetric scatterometry system in the MWIR and LWIR
Fitzgerald, Thomas M., Marciniak, Michael A., Nauyoks, Stephen E., Gu, Zu-Han, Hanssen, Leonard M.Volume:
7792
Year:
2010
Language:
english
DOI:
10.1117/12.859870
File:
PDF, 5.00 MB
english, 2010