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SPIE Proceedings [SPIE SPIE Optical Systems Design - Barcelona, Spain (Monday 26 November 2012)] Optical Systems Design 2012 - Design of an optical position detection unit for fast 2D-MOEMS scanners
Tortschanoff, A., Sandner, T., Kenda, A., Mazuray, Laurent, Wartmann, Rolf, Wood, Andrew P., de la Fuente, Marta C., Tissot, Jean-Luc M., Raynor, Jeffrey M., Kidger, Tina E., David, Stuart, Benítez, PVolume:
8550
Year:
2012
Language:
english
DOI:
10.1117/12.979930
File:
PDF, 1.56 MB
english, 2012