Dependence of Acid Generation Efficiency on Molecular...

Applied Physics Express 2008 / 2 Vol. 1

Dependence of Acid Generation Efficiency on Molecular Structures of Acid Generators upon Exposure to Extreme Ultraviolet Radiation

Hirose, Ryo, Kozawa, Takahiro, Tagawa, Seiichi, Kai, Toshiyuki, Shimokawa, Tsutomu
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Volume:
1
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.1.027004
Date:
February, 2008
File:
PDF, 110 KB
english, 2008
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