X-ray Reflectivity Study on Depth Profile of Acid Generator...

Applied Physics Express 2008 / 6 Vol. 1

X-ray Reflectivity Study on Depth Profile of Acid Generator Distribution in Chemically Amplified Resists

Fukuyama, Takehiro, Kozawa, Takahiro, Tagawa, Seiichi, Takasu, Ryoichi, Yukawa, Hiroto, Sato, Mitsuru, Onodera, Junichi, Hirosawa, Ichiro, Koganesawa, Tomoyuki, Horie, Kazuyuki
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Volume:
1
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.1.065004
Date:
June, 2008
File:
PDF, 606 KB
english, 2008
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