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Ion beam assisted deposition under off-normal ion incidence: an experimental and analytical study of re-sputtering effects
B Enders, A Chayahara, K FujiiVolume:
128-129
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00587-9
File:
PDF, 157 KB
english, 2000