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Deposition of diamond-like carbon films using plasma source ion implantation with pulsed plasmas
S Miyagawa, S Nakao, K Saitoh, K Baba, Y MiyagawaVolume:
128-129
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00588-0
File:
PDF, 256 KB
english, 2000