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Growth and characterisation of hard and elastic carbon nitride thin films
A Kolitsch, W Möller, Th Malkow, S.J Bull, V Magula, M DomankovaVolume:
128-129
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(00)00590-9
File:
PDF, 335 KB
english, 2000