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Plasma immersion ion implantation of complex-shaped objects: an experimental study on the treatment homogeneity
W Ensinger, K Volz, T HöchbauerVolume:
128-129
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00601-0
File:
PDF, 174 KB
english, 2000