![](/img/cover-not-exists.png)
C–SiC–Si gradient films formed on silicon by ion beam assisted deposition at room temperature
K Volz, M Kiuchi, M Okumura, W EnsingerVolume:
128-129
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(00)00604-6
File:
PDF, 307 KB
english, 2000