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A modified, filtered, pulsed cathodic vacuum arc implantation and deposition apparatus with the filtering duct working as a second anode
Wang Guangfu, Zhang Huixing, Zhang Xiaoji, Wu Yuguang, Tian RenheVolume:
128-129
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(00)00620-4
File:
PDF, 152 KB
english, 2000