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Macro-particle free metal plasma immersion ion implantation and/or deposition in a multifunctional configuration
T Zhang, B.Y Tang, Z.M Zeng, Q.C Chen, X.B Tian, T.K Kwok, P.K Chu, O.R Monteiro, I.G BrownVolume:
128-129
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00653-8
File:
PDF, 396 KB
english, 2000