Limits of ultra-thin multilayers by pulsed vacuum arc...

Limits of ultra-thin multilayers by pulsed vacuum arc deposition

Sung-Yong Chun, Akiyoshi Chayahara
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Volume:
132
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(00)00734-9
File:
PDF, 449 KB
english, 2000
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