Observation of the Surface Morphology on the (0001)C Facet of 4H-SiC Boules
Yamaguchi, Tomoki, Sato, Shunsuke, Ohtani, Noboru, Katsuno, Masakazu, Fujimoto, Tatsuo, Sato, Shinya, Tsuge, Hiroshi, Yano, TakayukiVolume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.64
Date:
June, 2015
File:
PDF, 428 KB
english, 2015